High Pressure Pump CP-01
High Pressure pump CP-01 Introduction
Utilized in processes:
Yellow Light Cleaning Process,
Etch Cleaning Process,
Bumping Cleaning Process.
Single wafer cleaning.
Pump Function Description:
Sensor-driven solenoid valve supplies gas source switching,
pressurizing and outputting liquids (such as ultrapure water, photoresist remover, etc.),ensuring relative safety.
Independently developed dual-axis Pump maintains stable pressure output, prolonging the lifespan compared to single-axis Pumps.
It can prevent complete pressure failure in the event of damage and effectively maintain pressure during minor leakage.
| High Pressure pump CP-01 | Advantages Explanation |
|---|---|
| Easy horizontal installation setup. Direct piping reduces the risk of joint thread leakage. Dual-axis switching ensures continuous pressure supply. Material for chemical section is stainless steel SUS316. CHECK VALVE SEAL part is made of fluororesin. |
High Pressure pump CP-01 specifications - 50x
| No. | Item | Specifications |
|---|---|---|
| 1 | Temperature | 0~50°C / 0~90°C / Operating temperature 80°C |
| 2 | Maximum output pressure | 3000PSI |
| 3 | Maximum driving pressure | 0.5 MPa |
| 4 | Minimum driving pressure | 0.1 MPa |
| 5 | AIR IN | 3/8“PT |
| 6 | AIR OUT | 3/8“PT |
| 7 | PUMP IN | 1/4" SUS316 TUBE ferrule connector |
| 8 | PUMP OUT | 1/4" SUS316 TUBE ferrule connector |
| 9 | Output volume | 50C.C |
| 10 | Power supply | DC24V |
| 11 | STROKE SENSOR | NPN three-wire DC24V |
| 12 | Number of driving gas sources | 2 |
High Pressure pump CP-01 specifications - 34x
| No. | Item | Specifications |
|---|---|---|
| 1 | Temperature | 0~50°C / 0~90°C / Operating temperature 80°C |
| 2 | Maximum output pressure | 2400PSI |
| 3 | Maximum driving pressure | 0.5 MPa |
| 4 | Minimum driving pressure | 0.1 MPa |
| 5 | AIR IN | 3/8“PT |
| 6 | AIR OUT | 3/8“PT |
| 7 | PUMP IN | 1/4" SUS316 TUBE ferrule connector |
| 8 | PUMP OUT | 1/4" SUS316 TUBE ferrule connector |
| 9 | Output volume | 50C.C |
| 10 | Power supply | DC24V |
| 11 | STROKE SENSOR | NPN three-wire DC24V |
| 12 | Number of driving gas sources | 2 |